Record Type
Proceedings

Contributor Information

Author(s)
Ulmer M, Coppejans R, Khreishi M, Keely K, Buchholz D, Shiri R, Rodriguez L, O'Donnell A, Shonfeld Z, Reinhardt W, Borgsmiller L,
Baturalp T, Coverstone V, Cao J
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Title Information

Full Title
Magnetostrictively deforming the surface of a Silicon wafer at two locations
Publication Title
Publication Title (abbreviated)
PROC SPIE

Identifiers

DOI
10.1117/12.2322511
ISSN
0277-786X
ISBN
978-1-5106-2094-0
Article Number
UNSP 107610B

Publication Information

Publication Date
2018
Volume
10761
Page Count
9

Conference Information

Conference Date
AUG 21, 2018
Conference Location
Conference Sponsor
Citation
Ulmer M, Coppejans R, Khreishi M, Keely K, Buchholz D, Shiri R, Rodriguez L, O'Donnell A, Shonfeld Z, Reinhardt W, et al. Magnetostrictively deforming the surface of a Silicon wafer at two locations. In: ADAPTIVE X-RAY OPTICS V. Conference on Adaptive X-Ray Optics V; 2018. p. 9.

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