Record Type
Proceedings

Contributor Information

Author(s)
Oh L, Li M, Kim K, Kelly D, Kutyrev A, Moseley S

Title Information

Full Title
FABRICATION OF ELECTROSTATICALLY ACTUATED SILICON NITRIDE MICROSHUTTER ARRAYS
Publication Title
Publication Title (abbreviated)
IEEE SENSOR

Identifiers

ISSN
1930-0395
ISBN
978-1-5090-1012-7

Publication Information

Publication Date
2017
First Page
199
Last Page
201
Page Count
3

Conference Information

Citation
Oh L, Li M, Kim K, Kelly D, Kutyrev A, Moseley S. FABRICATION OF ELECTROSTATICALLY ACTUATED SILICON NITRIDE MICROSHUTTER ARRAYS. In: 2017 IEEE SENSORS. 16th IEEE SENSORS CONFERENCE; 2017. p. 199-201.

Copyright