Record Type
Journal Articles

Contributor Information

Author(s)
Burns D, Oh L, Li M, Kelly D, Kutyrev A, Moseley S

Title Information

Full Title
2-D Electrostatic Actuation of Microshutter Arrays

Identifiers

DOI
10.1109/JMEMS.2015.2498411

Publication Information

Publication Date
2015
Volume
PP
Issue
99
First Page
1
Last Page
7
Citation
Burns D, Oh L, Li M, Kelly D, Kutyrev A, Moseley S. 2-D Electrostatic Actuation of Microshutter Arrays. Microelectromechanical Systems, Journal of. 2015;PP (99):1-7.

Copyright