Record Type
Journal Articles

Contributor Information

Author(s)
Morgan B, Waits C, Krizmanic J, Ghodssi R

Title Information

Full Title
Development of a deep silicon phase Fresnel lens using gray-scale lithography and deep reactive ion etching
Publication Title (abbreviated)
J MICROELECTROMECH S

Identifiers

DOI
10.1109/JMEMS.2003.823220
ISSN
1057-7157

Publication Information

Publication Date
2004 Feb
Volume
13
Issue
1
First Page
113
Last Page
120
Page Count
8
Citation
Morgan B, Waits C, Krizmanic J, Ghodssi R. Development of a deep silicon phase Fresnel lens using gray-scale lithography and deep reactive ion etching. J MICROELECTROMECH S. 2004;13 (1):113-120.

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