Record Type
Proceedings

Contributor Information

Author(s)
Burns D, Jones J, Li M

Title Information

Full Title
Mechanical Behavior of Microelectromechanical Microshutters
Publication Title (abbreviated)
PROC SPIE

Identifiers

DOI
10.1117/12.2060449
ISSN
0277-786X
ISBN
978-1-62841-197-3
Article Number
917009

Publication Information

Publication Date
2014
Volume
9170
Page Count
8

Conference Information

Conference Date
AUG 19-20, 2014
Conference Location
Conference Sponsor
Citation
Burns D, Jones J, Li M. Mechanical Behavior of Microelectromechanical Microshutters. In: NANOENGINEERING: FABRICATION, PROPERTIES, OPTICS, AND DEVICES XI. Conference on Nanoengineering - Fabrication, Properties, Optics, and Devices XI; 2014. p. 8.

Copyright