Record Type
Journal Articles

Contributor Information

Author(s)
Sun J, Choi K, Jhabvala M, Jhabvala C, Waczynski A, Olver K

Title Information

Full Title
Advanced Inductively Coupled Plasma Etching Processes for Fabrication of Resonator-Quantum Well Infrared Photodetector
Publication Title

Identifiers

DOI
http://dx.doi.org/10.1016/j.infrared.2014.09.022
ISSN
1350-4495

Publication Information

Publication Date
2015 May
Volume
70
First Page
25
Last Page
29
Citation
Sun J, Choi K, Jhabvala M, Jhabvala C, Waczynski A, Olver K. Advanced Inductively Coupled Plasma Etching Processes for Fabrication of Resonator-Quantum Well Infrared Photodetector. Infrared Physics & Technology. 2015;70 25-29.

Copyright