Record Type
Journal Articles

Contributor Information

Author(s)
Sun J, Choi K, Jhabvala M, Jhabvala C

Title Information

Full Title
Advanced substrate thinning process for GaAs-based devices
Publication Title (abbreviated)
J MICRO-NANOLITH MEM

Identifiers

DOI
10.1117/1.3580755
ISSN
1932-5150
Article Number
023004

Publication Information

Publication Date
2011 Apr
Volume
10
Issue
2
Page Count
4
Citation
Sun J, Choi K, Jhabvala M, Jhabvala C. Advanced substrate thinning process for GaAs-based devices. J MICRO-NANOLITH MEM. 2011;10 (2):4.

Copyright