Fabrication of a Silicon Backshort Assembly for Waveguide-Coupled Superconducting Detectors

Record Type
Journal Articles
Full Title
Fabrication of a Silicon Backshort Assembly for Waveguide-Coupled Superconducting Detectors
Author(s)
Crowe E, Bennett C, Chuss D, Denis K, Eimer J, Lourie N, Marriage T, Moseley S, Rostem K, Stevenson T, Towner D, U-yen K, Wollack E
Publication Title
Applied Superconductivity, IEEE Transactions on
Publication Date
2013 Jun
DOI
10.1109/TASC.2012.2237211
Volume
23
Issue
3
First Page
2500505
Keyword(s)
Superconducting microstrip, deep reactive ion etching, surface roughness, transition edge sensors, wafer bonding
Citation
Crowe E, Bennett C, Chuss D, Denis K, Eimer J, Lourie N, Marriage T, Moseley S, Rostem K, Stevenson T, et al. Fabrication of a Silicon Backshort Assembly for Waveguide-Coupled Superconducting Detectors. Applied Superconductivity, IEEE Transactions on. 2013;23 (3):2500505.
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