MEMS microshutter arrays for James Webb space telescope

Record Type
Journal Articles
Full Title
MEMS microshutter arrays for James Webb space telescope
Author(s)
Li M, Adachi T, Allen C, Babu S, Bajikar S, Beamesderfer M, Bradley R, Denis K, Costen N, Ewin A, Franz D, Hess L, Hu R, Jackson K, Jhabvala M, Kelly D, King T, Kletetschka G, Kutyrev A, Lynch B, Miller T, Moseley H, Mikula V, Mott B, Oh L, Pontius J, Rapchun D, Ray C, Schulte E, Schwinger S, Shu P, Silverberg R, Smith W, Snodgrass S, Sohl D, Sparr L, Steptoe-Jackson R, Veronica V, Wang L, Zheng Y, Zincke C
Publication Title
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III
Publication Title (abbreviated)
P SOC PHOTO-OPT INS
Publication Date
2007
DOI
10.1117/12.706308
ISSN
0277-786X
ISBN
978-0-8194-6523-8
Volume
6415
Page Count
14
First Page
B4150
Last Page
B4150
Article Number
64150B
Keyword(s)
Optics, rnicroshutter, MEMS, RIE, DRIE, micro-optics, near infrared, space telescope, flip chip bonding
Citation
Li M, Adachi T, Allen C, Babu S, Bajikar S, Beamesderfer M, Bradley R, Denis K, Costen N, Ewin A, et al. MEMS microshutter arrays for James Webb space telescope. P SOC PHOTO-OPT INS. 2007;6415 B4150-B4150.
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