Image Registration for Stability Testing of MEMS

Record Type

  • Journal Articles

Full Title

  • Image Registration for Stability Testing of MEMS

Author(s)

  • Memarsadeghi N, Le Moigne J, Blake P, Morey P, Landsman W, Chambers V, Moseley S

Publication Title

Publication Title (abbreviated)

  • PROC SPIE

Publication Date

  • 2011

DOI

  • 10.1117/12.872076

ISSN

  • 0277-786X

ISBN

  • 978-0-8194-8410-9

Volume

  • 7873

Page Count

  • 7

Article Number

  • 78730G

Keyword(s)

Citation

  • Memarsadeghi N, Le Moigne J, Blake P, Morey P, Landsman W, Chambers V, Moseley S. Image Registration for Stability Testing of MEMS. PROC SPIE. 2011;7873 7.

Conditions of Use

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  • Author can archive post-print (i.e., final draft post-refereeing)
  • On author's personal website or employer's non-commercial website only
  • Publisher copyright and source must be acknowledged with set statement (see policy)
  • Publisher's version/PDF may be used (preferred)
  • Must link to publisher version using DOI
  • Policy reviewed on 24/06/2014

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