Advanced substrate thinning process for GaAs-based devices

Record Type

  • Journal Articles

Full Title

  • Advanced substrate thinning process for GaAs-based devices

Author(s)

  • Sun J, Choi K, Jhabvala M, Jhabvala C

Publication Title

Publication Title (abbreviated)

  • J MICRO-NANOLITH MEM

Publication Date

  • 2011 Apr

DOI

  • 10.1117/1.3580755

ISSN

  • 1932-5150

Volume

  • 10

Issue

  • 2

Page Count

  • 4

Article Number

  • 023004

Keyword(s)

Citation

  • Sun J, Choi K, Jhabvala M, Jhabvala C. Advanced substrate thinning process for GaAs-based devices. J MICRO-NANOLITH MEM. 2011;10 (2):4.

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