Advanced substrate thinning process for GaAs-based devices

Record Type
Journal Articles
Full Title
Advanced substrate thinning process for GaAs-based devices
Author(s)
Sun J, Choi K, Jhabvala M, Jhabvala C
Publication Title
JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS
Publication Title (abbreviated)
J MICRO-NANOLITH MEM
Publication Date
2011 Apr
DOI
10.1117/1.3580755
ISSN
1932-5150
Volume
10
Issue
2
Page Count
4
Article Number
023004
Keyword(s)
Engineering, Science & Technology - Other Topics, Materials Science, Optics, inductively coupled plasma selective etching, corrugated quantum well infrared photodetector focal plane arrays, GaAs substrate thinning, ALGAAS, ETCH, PLASMAS, LAYERS, DAMAGE
Citation
Sun J, Choi K, Jhabvala M, Jhabvala C. Advanced substrate thinning process for GaAs-based devices. J MICRO-NANOLITH MEM. 2011;10 (2):4.
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