Non-Contact Stiffness Measurement of a Suspended Single Walled Carbon Nanotube Device

Record Type
Proceedings
Full Title
Non-Contact Stiffness Measurement of a Suspended Single Walled Carbon Nanotube Device
Author(s)
Zheng Y, Su C, Getty S
Publication Title
NANOENGINEERING: FABRICATION, PROPERTIES, OPTICS, AND DEVICES VII
Publication Title (abbreviated)
P SOC PHOTO-OPT INSTRUM ENG
Publication Date
2010
DOI
10.1117/12.861289
ISSN
0277-786X
ISBN
978-0-8194-8260-0
Volume
7764
Page Count
10
Article Number
77640K
Conference Name
Conference on Nanoengineering - Fabrication, Properties, Optics, and Devices VII
Conference Date
AUG 03-04, 2010
Conference Location
San Diego, CA
Conference Sponsor
SPIE
Keyword(s)
Optics, Non-contact stiffness measurement, Resonant frequency, Nanotechnology, MEMS, Single-walled carbon nanotubes, Electric field sensor
Citation
Zheng Y, Su C, Getty S. Non-Contact Stiffness Measurement of a Suspended Single Walled Carbon Nanotube Device. In: NANOENGINEERING: FABRICATION, PROPERTIES, OPTICS, AND DEVICES VII. Conference on Nanoengineering - Fabrication, Properties, Optics, and Devices VII; 2010. p. 10.
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