JWST Microshutter Array System and Beyond

Record Type
Proceedings
Full Title
JWST Microshutter Array System and Beyond
Author(s)
Li M, Brown A, Kutyrev A, Moseley S, Mikula V
Publication Title
MOEMS AND MINIATURIZED SYSTEMS IX
Publication Title (abbreviated)
P SOC PHOTO-OPT INSTRUM ENG
Publication Date
2010
DOI
10.1117/12.843728
ISSN
0277-786X
ISBN
978-0-8194-7990-7
Volume
7594
Page Count
9
Article Number
75940N
Conference Name
Conference on MOEMS and Miniaturized Systems IX
Conference Date
JAN 25-27, 2010
Conference Location
San Francisco, CA
Conference Sponsor
SPIE
Keyword(s)
micro-optics, near infrared, space telescope, indium bump bonding, packaging, microshutter, MEMS, DRIE
Citation
Li M, Brown A, Kutyrev A, Moseley S, Mikula V. JWST Microshutter Array System and Beyond. In: MOEMS AND MINIATURIZED SYSTEMS IX. Conference on MOEMS and Miniaturized Systems IX; 2010. p. 9.
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