A miniature MEMS and NEMS enabled time-of-flight mass spectrometer for investigations in planetary science

Record Type

  • Proceedings

Full Title

  • A miniature MEMS and NEMS enabled time-of-flight mass spectrometer for investigations in planetary science

Author(s)

  • Roman P, Brinckerhoff W, Getty S, Herrero F, Hu R, Jones H, Kahle D, King T, Mahaffy P

Publication Title

Publication Title (abbreviated)

  • P SOC PHOTO-OPT INSTRUM ENG

Publication Date

  • 2008

DOI

  • 10.1117/12.777670

ISSN

  • 0277-786X

ISBN

  • 978-0-8194-7150-5

Volume

  • 6959

Page Count

  • 13

First Page

  • G9590

Last Page

  • G9590

Article Number

  • 69590G

Conference Name

Conference Date

  • MAR 18-20, 2008

Conference Location

Conference Sponsor

Keyword(s)

Citation

  • Roman P, Brinckerhoff W, Getty S, Herrero F, Hu R, Jones H, Kahle D, King T, Mahaffy P. A miniature MEMS and NEMS enabled time-of-flight mass spectrometer for investigations in planetary science. In: MICRO (MEMS) AND NANOTECHNOLOGIES FOR SPACE, DEFENSE, AND SECURITY II. 2nd Conference on Micro (MEMS) and Nanotechnologies for Space, Defense, and Security; 2008. p. G9590-G9590.

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