A miniature MEMS and NEMS enabled time-of-flight mass spectrometer for investigations in planetary science

Record Type
Proceedings
Full Title
A miniature MEMS and NEMS enabled time-of-flight mass spectrometer for investigations in planetary science
Author(s)
Roman P, Brinckerhoff W, Getty S, Herrero F, Hu R, Jones H, Kahle D, King T, Mahaffy P
Publication Title
MICRO (MEMS) AND NANOTECHNOLOGIES FOR SPACE, DEFENSE, AND SECURITY II
Publication Title (abbreviated)
P SOC PHOTO-OPT INSTRUM ENG
Publication Date
2008
DOI
10.1117/12.777670
ISSN
0277-786X
ISBN
978-0-8194-7150-5
Volume
6959
Page Count
13
First Page
G9590
Last Page
G9590
Article Number
69590G
Conference Name
2nd Conference on Micro (MEMS) and Nanotechnologies for Space, Defense, and Security
Conference Date
MAR 18-20, 2008
Conference Location
Orlando, FL
Conference Sponsor
SPIE
Keyword(s)
Nanoscience & Nanotechnology, Optics, mass spectrometry, TOF, EI, MEMS, NEMS, carbon nanotube, electron gun, micro valve, micro leak, MICROELECTROMECHANICAL SYSTEMS, HUYGENS PROBE, ATMOSPHERE, INSTRUMENT, ION
Citation
Roman P, Brinckerhoff W, Getty S, Herrero F, Hu R, Jones H, Kahle D, King T, Mahaffy P. A miniature MEMS and NEMS enabled time-of-flight mass spectrometer for investigations in planetary science. In: MICRO (MEMS) AND NANOTECHNOLOGIES FOR SPACE, DEFENSE, AND SECURITY II. 2nd Conference on Micro (MEMS) and Nanotechnologies for Space, Defense, and Security; 2008. p. G9590-G9590.
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