Development and operation of the microshutter array system

Record Type

  • Proceedings

Full Title

  • Development and operation of the microshutter array system

Author(s)

  • Jhabvala M, Franz D, King T, Kletetschka G, Kutyrev A, Li M, Meyer S, Moseley S, Schwinger S, Silverberg R

Publication Title

Publication Title (abbreviated)

  • P SOC PHOTO-OPT INSTRUM ENG

Publication Date

  • 2008

DOI

  • 10.1117/12.775768

ISSN

  • 0277-786X

ISBN

  • 978-0-8194-7150-5

Volume

  • 6959

Page Count

  • 17

First Page

  • C9590

Last Page

  • C9590

Article Number

  • 69590C

Conference Name

Conference Date

  • MAR 18-20, 2008

Conference Location

Conference Sponsor

Keyword(s)

Citation

  • Jhabvala M, Franz D, King T, Kletetschka G, Kutyrev A, Li M, Meyer S, Moseley S, Schwinger S, Silverberg R. Development and operation of the microshutter array system. In: MICRO (MEMS) AND NANOTECHNOLOGIES FOR SPACE, DEFENSE, AND SECURITY II. 2nd Conference on Micro (MEMS) and Nanotechnologies for Space, Defense, and Security; 2008. p. C9590-C9590.

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