Development and operation of the microshutter array system

Record Type
Proceedings
Full Title
Development and operation of the microshutter array system
Author(s)
Jhabvala M, Franz D, King T, Kletetschka G, Kutyrev A, Li M, Meyer S, Moseley S, Schwinger S, Silverberg R
Publication Title
MICRO (MEMS) AND NANOTECHNOLOGIES FOR SPACE, DEFENSE, AND SECURITY II
Publication Title (abbreviated)
P SOC PHOTO-OPT INSTRUM ENG
Publication Date
2008
DOI
10.1117/12.775768
ISSN
0277-786X
ISBN
978-0-8194-7150-5
Volume
6959
Page Count
17
First Page
C9590
Last Page
C9590
Article Number
69590C
Conference Name
2nd Conference on Micro (MEMS) and Nanotechnologies for Space, Defense, and Security
Conference Date
MAR 18-20, 2008
Conference Location
Orlando, FL
Conference Sponsor
SPIE
Keyword(s)
Nanoscience & Nanotechnology, Optics, microshutters, microshutter arrays, micromirrors, MEMS, DMD, James Webb Space Telescope
Citation
Jhabvala M, Franz D, King T, Kletetschka G, Kutyrev A, Li M, Meyer S, Moseley S, Schwinger S, Silverberg R. Development and operation of the microshutter array system. In: MICRO (MEMS) AND NANOTECHNOLOGIES FOR SPACE, DEFENSE, AND SECURITY II. 2nd Conference on Micro (MEMS) and Nanotechnologies for Space, Defense, and Security; 2008. p. C9590-C9590.
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